Nonlinear model reduction strategies for rapid thermal processing systems

Nonlinear Model Reduction Strategies For Rapid Thermal Processing Systems - Semiconductor Manufacturing, IEEE Transactions on

We present a systematic method for developing low order nonlinear models from physically based, large scale finite element models of rapid thermal processing (RTP) systems. These low order models are extracted from transient results of a detailed finite element model using the proper orthogonal decomposition (POD) method. Eigenfunctions obtained from the POD method are then used as basis functi...

Thermal Model of Rapid Thermal Processing Systems

Continuously shrinking device parameters and the enlargement of wafer diameters in semiconductor industry require best temperature homogeneity in Rapid Thermal Processing (RTP). This together with the requirement of high ramp rates in the range of 200 °C s as advantageously used in ultra shallow junction processes [1] challenges temperature control in RTP technology. In order to design advanced...

Model reduction for nonlinear control systems

Model Order Reduction of Nonlinear Dynamical Systems

Model Order Reduction of Nonlinear Dynamical Systems by Chenjie Gu Doctor of Philosophy in Electrical Engineering and Computer Science University of California, Berkeley Professor Jaijeet Roychowdhury, Chair Higher-level representations (macromodels, reduced-order models) abstract away unnecessary implementation details and model only important system properties such as functionality. This meth...

Model Reduction of Weakly Nonlinear Systems

1. INTRODUCTION As the level of detail and intricacy of dynamical system models continues to grow, the essential behaviour of such systems can be lost in a cloud of complexity. Furthermore, numerical simulations of such systems can consume extensive memory resources and take inordinate amounts of time. Consequently, to cope with the growing complexity and dimension-ality of systems, model reduc...